Bismuth compound, process of producing the same, and process...

Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing

Reexamination Certificate

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C427S248100

Reexamination Certificate

active

06916944

ABSTRACT:
A novel bismuth compound having excellent vaporization characteristic and/or thermal stability, a process of producing the same and a process of producing a film in the film formation by the CVD process are disclosed. Bismuth compounds each represented by the following formula 1, 5 and 9, processes of producing the same, and processes of producing a film.In the formulae, R1and R7each represents a lower alkyl group; R2, R8, R12, and R13each represents a lower alkyl group, a lower alkoxy group, or the like; m represents the number of the substituent R12in the range of 0-5; n1, n2, and n3respectively represent the number of the substituent R2, the number of the substituent R8, and the number of the substituent R13each in the range of 0-4; and R3to R6, R9to R11, R14, and R15each represents hydrogen, a lower alkyl group, or the like, provided that specific combinations of the substituents are excluded.

REFERENCES:
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European Search Report dated Jul. 28, 2004.

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