Bisamido azides of gallium, aluminum and indium and their use as

Details Bisamido azides of gallium, aluminum and indium and their use as Bisamido azides of gallium, aluminum and indium and their use as

1995-08-29

1997-10-07

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Azides

556 1, 556 27, 556176, 501 96, 501 94, 423410, C07F 500, C04B 3558, C01B 2108

Patent

active

056750285

ABSTRACT:
There are disclosed bisamido azides of gallium (Ga), aluminum (Al), or Indium (In) which when pyrolized in accordance with the invention, produce metal nitride films on a substrate. A representative example of a bisamido azide is bisdimethylamidogallium azide, (CH.sub.3)N).sub.2 GaN.sub.3.

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