Bipolar transistor with silicided sub-collector

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...

Reexamination Certificate

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Details

C438S304000, C438S311000, C438S361000, C438S655000, C438S682000, C257SE29034, C257SE29114

Reexamination Certificate

active

08003473

ABSTRACT:
Embodiments of the invention provide a method of fabricating a semiconductor device. The method includes defining a sub-collector region in a layer of doped semiconductor material; forming an active region, a dielectric region, and a reach-through region on top of the layer of doped semiconductor material with the dielectric region separating the active region from the reach-through region; and siliciding the reach-through region and a portion of the sub-collector region to form a partially silicided conductive pathway. A semiconductor device made thereby is also provided.

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patent: 2004090989 (2004-10-01), None

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