Bipolar transistor with low extrinsic base resistance and low no

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure – With base region having specified doping concentration...

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257593, H01L 2972, H01L 21265

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active

052742679

ABSTRACT:
An improved NPN transistor and method of building thereof includes: a P- substrate 50; a N+ buried region 52 provided therein; a N- epitaxial layer 56 deposited onto the N buried region; a P base diffusion region 66 in the N- epi layer; a N+ reach-through region 60 through the N- epi layer to the N+ buried layer to thereby define a collector; a N++ implant or diffusion region 102 provided in the P base diffusion region to thereby define an emitter; and a P++ implant region 74 provided around the N++ emitter implant region which thereby defines the extrinsic base of the transistor, wherein the P++ implant region extends through the P region into the N- epi layer and wherein the P++ implant region extends as close to the N++ emitter implant region as possible without encroaching on the emitter.

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patent: 4706378 (1987-11-01), Havemann
patent: 4824799 (1989-04-01), Komatsu
patent: 4866000 (1989-09-01), Okita
patent: 4879252 (1989-11-01), Komatsu
patent: 4980302 (1990-12-01), Shimizu
patent: 4987089 (1991-01-01), Roberts
patent: 4996581 (1991-02-01), Hamasaki

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