Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1974-12-06
1976-09-21
Tupman, W.
Metal working
Method of mechanical manufacture
Assembling or joining
148187, 357 91, 29577, B01J 1700
Patent
active
039810720
ABSTRACT:
A thick layer of silicon dioxide is grown on a semiconductive substrate and then etched to form an elongated opening that defines the outer boundaries of a diffused transistor. The thick silicon dioxide layer serves as a permanent fixed, diffusion mask. The first diffusion is performed through the permanent mask opening. Thereafter, portions of the elongated opening are masked by secondary thin layers of silicon dioxide or photo-resist, and subsequent diffusions are performed through different unmasked portions of the elongated opening.
REFERENCES:
patent: 2981877 (1961-04-01), Noyce
patent: 3523042 (1970-08-01), Bower
patent: 3542551 (1970-11-01), Rice
patent: 3615929 (1971-10-01), Portnoy
patent: 3655457 (1972-04-01), Duffy
patent: 3833429 (1974-09-01), Monma
Anderson Daniel T.
Dinardo Jerry A.
Oser Edwin A.
TRW Inc.
Tupman W.
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