Biosensor matrix and method for making same

Details Biosensor matrix and method for making same Biosensor matrix and method for making same

2005-08-16

2005-08-16

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C438S048000

Reexamination Certificate

active

06930365

ABSTRACT:
The invention relates to a biosensor matrix comprising a substrate made of semiconductor material. It has a main plane surface and cavities formed in a surface opposite from said plane surface to define between the bottoms of said cavities and the main plane surface deformable structure each including at least one piezoresistive or piezoelectric sensing element. The method of manufacture implements fabrication techniques specific to micro- and nanotechnologies, preferably with localized pre-amorphization of the surface of the substrate prior to implantation of piezoelectric elements, which implantation is followed by annealing.

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XP-002189581—“Ultra-shallow raised p<+>n junctions with self-aligned titanium silicide contacts formedby boron outdiffusion from selectively deposited silicon epitaxial layers” c. 1995.
“Rapid thermal processing of piezoresistive polycrystalline silicon films: an innovative technology for low cost pressure sensor fabrication” c. 1995.

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