Biomedical device with a protective overlayer

Details Biomedical device with a protective overlayer Biomedical device with a protective overlayer

1996-03-14

1998-05-26

Kamm, William E.

Surgery: light, thermal, and electrical application

Light, thermal, and electrical application

Electrical energy applicator

A61N 105

Patent

active

057557594

ABSTRACT:
A biomedical device provided with a protective overlayer with high electronic resistivity and low permeability to H.sub.2 O; the protective overlayer comprising at least one thin film of amorphous silicon oxycarbide (a-SiOC:H) in which the oxygen/carbon ratio is such that the electronic resistivity of the a-SiOC:H is greater than 10.sup.14 .OMEGA.-cm and the H.sub.2 O permeability is less than 5.times.10.sup.14 molecules/sec-cm.sup.2.

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patent: 5530581 (1996-06-01), Cogan
Chang et al., "Novel Passivation Dielectrics--The Boron- or Phosphorus-Doped Hydrogenated Amorphous Silicon Carbide Films," J. Electrochem. Soc., 132, 418-422 (1985).

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