Binary sinusoidal sub-wavelength gratings as alignment marks

Details Binary sinusoidal sub-wavelength gratings as alignment marks Binary sinusoidal sub-wavelength gratings as alignment marks

2011-01-04

2011-01-04

Le, Thao X (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C438S462000, C438S463000, C356S496000, C356S498000, C356S485000

Reexamination Certificate

active

07863763

ABSTRACT:
The present invention relates to alignment marks for use on substrates, the alignment marks consisting of periodic 2-dimensional arrays of structures, the spacing of the structures being smaller than an alignment beam but larger than an exposure beam and the width of the structures varying sinusoidally from one end of an array to the other.

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Translation of foreign Office Action mailed Sep. 3, 2009 in related patent application No. JP2006/308751.

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