Metal working – Piezoelectric device making
Reexamination Certificate
2008-07-30
2010-11-09
Banks, Derris H (Department: 3729)
Metal working
Piezoelectric device making
C029S592100, C029S593000, C029S594000, C029S595000, C310S300000, C310S307000, C073S776000, C073S774000, C073S781000, C257S414000
Reexamination Certificate
active
07827660
ABSTRACT:
A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.
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Gogoi Bishnu Prasanna
Yazdi Navid
Banks Derris H
Carley Jeffrey
Evigia Systems Inc.
Hartman Domenica N. S.
Hartman Gary M.
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