Bidirectional vacuum valve

Details Bidirectional vacuum valve Bidirectional vacuum valve

1992-04-30

1992-12-29

Cohan, Alan

Fluid handling

Systems

Programmer or timer

1376253, 137629, 251 28, G05D 1600

Patent

active

051743353

ABSTRACT:
To evacuate a vacuum chamber without stirring up particles in the chamber or associated piping, a pneumatically-actuated vacuum valve is used between the chamber and the vacuum pump. The valve controls evacuation in two stages: in the first stage, the valve partially opens, and a skirt with leak vents in it is brought into play so that air is drawn slowly through the leak vents to gradually achieve a vacuum of a few Torr without stirring up particles; in the second stage, the valve fully opens, and the remaining air in the chamber can be drawn out efficiently, utilizing the large diameter of the valve fully, without risk of stirring up particles. The actuation of the valve is controlled by a timer, which dictates how long the valve stays in the partially-open state before switching to the fully-open state.

REFERENCES:
patent: 3757820 (1973-09-01), Aylesworth
patent: 3821968 (1974-07-01), Barb
patent: 4672203 (1987-06-01), Holkeboer

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