Bicmos process that supports merged devices

Details Bicmos process that supports merged devices Bicmos process that supports merged devices

1994-04-28

1996-07-30

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437162, 437952, 148DIG123, H01L 218249

Patent

active

055411347

ABSTRACT:
A merged BiCMOS device 10 having a bipolar transistor 60 and a PMOS transistor 64 formed in the same well region 18a. Bipolar transistor 60 is comprised of an emitter electrode 30, base region 26, and collector region formed by well region 18b. Emitter electrode 30 is separated from base region 26 by thick oxide 24. PMOS transistor 64 comprises source/drain regions 52 and 52a, gate electrode 40, and gate oxide 36. PMOS transistor 64 may also comprises LDD regions 44. Source/drain region 52a is in contact with base region 26. If desired, the emitter electrode 30 and gate electrode 40 may be silicided.

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