BiCMOS process and process for forming bipolar transistors on wa

Details BiCMOS process and process for forming bipolar transistors on wa BiCMOS process and process for forming bipolar transistors on wa

1990-07-23

1991-01-22

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 31, 437 46, 437 56, 437 59, 437 29, 437186, 437 57, 148DIG9, 148DIG82, H01L 21265

Patent

active

049870890

ABSTRACT:
A process for fabricating integrated circuits containing bipolar transistors in semiconductor wafers comprising the following steps:

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patent: 4874717 (1989-10-01), Neppl et al.
patent: 4891328 (1990-01-01), Gris
patent: 4927776 (1990-05-01), Soejima

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