Biaxial scanning mirror having resonant frequency adjustment

Details Biaxial scanning mirror having resonant frequency adjustment Biaxial scanning mirror having resonant frequency adjustment

2010-05-26

2011-12-06

Cherry, Euncha (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

Reexamination Certificate

active

08072664

ABSTRACT:
A biaxial micro-electromechanical (MEMS) device is disclosed. The device includes a gimbal rotatable about a gimbal axis of rotation. A pair of gimbal torsion bars connects the gimbal to a support along the gimbal rotation axis. A mirror plate is rotatable about a mirror axis of rotation, the mirror plate rotation axis being substantially perpendicular to the gimbal rotation axis. A pair of mirror plate torsion bars connects the mirror plate to the gimbal along the mirror plate axis of rotation. One or more gimbal moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the gimbal axis of rotation. Additionally, one or more mirror plate moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the mirror plate rotation axis such that the distance from the mirror plate axis determines a resonant frequency of the biaxial MEMS device.

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