Biased electrostatic deflector

Details Biased electrostatic deflector Biased electrostatic deflector

2006-04-04

2006-04-04

Lee, John R. (Department: 2881)

Radiant energy

Electron energy analysis

C250S492100

Reexamination Certificate

active

07022984

ABSTRACT:
Angular electrostatic filters and methods of filtering that remove energy contaminants from a ribbon shaped ion beam are disclosed. An angular electrostatic filter comprises a top deflection plate and a bottom deflection plate extending from an entrance side to an exit side of the filter. The bottom deflection plate is substantially parallel to the top deflection plate and includes an angle portion. An entrance focus electrode is positioned on the entrance side of the filter and an exit focus electrode is positioned on the exit side of the filter and both serve to focus the ion beam. Edge electrodes are positioned between the top and bottom deflection plates and at sides of the filter to mitigate edge effects. A negative bias is also applied to the top and bottom plates to mitigate space charge by elevating the beam energy.

REFERENCES:
patent: 4959544 (1990-09-01), Sukenobu
patent: 6573517 (2003-06-01), Sugitani et al.

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