Bias voltage routing scheme for a digital micro-mirror device

Details Bias voltage routing scheme for a digital micro-mirror device Bias voltage routing scheme for a digital micro-mirror device

2006-09-12

2006-09-12

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S292000, C359S295000, C359S298000

Reexamination Certificate

active

07106492

ABSTRACT:
An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit. The apparatus also includes a conductive layer disposed inwardly from the at least one micro-mirror. In one particular embodiment, the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.

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patent: 6147790 (2000-11-01), Meier et al.
patent: 6618186 (2003-09-01), Kaeriyama

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