Bi-MOS type semiconductor integrated circuit device having high-

Fishing – trapping – and vermin destroying

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437 20, 437 63, 437162, 437192, 437193, 437233, 437235, 437248, 257378, 257382, H01L 21265, H01L 2702

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052388506

ABSTRACT:
A Bi-MOS type semiconductor integrated circuit device having at least one bipolar transistor in an island region is provided. The island region is covered with a multilayer insulating film which is formed of a silicon oxide film and a silicon nitride film having a different etching resistance with each other. Collector and base contact holes and an intended emitter contact hole are formed in the multilayer insulating film at the same time to provide bipolar transistors having a fine structure. An insulated gate MOS transistor includes a protective film such as polysilicon film covering a gate insulating film to increase the reliability.

REFERENCES:
patent: 4978626 (1990-12-01), Poon et al.
patent: 4984042 (1991-01-01), Pfiester et al.
patent: 5023690 (1991-06-01), Verret et al.
patent: 5148252 (1992-09-01), Taka

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