Bi-directionally actuated thin membrane mirror

Details Bi-directionally actuated thin membrane mirror Bi-directionally actuated thin membrane mirror

2007-03-20

2007-03-20

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S295000

Reexamination Certificate

active

10999740

ABSTRACT:
A deformable membrane mirror and a related method for its use, the mirror including a deformable membrane having a reflective front face and a back face, and further including electrodes located on both sides of the membrane, to provide a desired surface contour without imparting a concave bias to the membrane. The electrodes include a first set of electrodes spaced from the back face of the membrane, and at least one additional electrode spaced from the front face of the membrane.

REFERENCES:
patent: 5170283 (1992-12-01), O'Brien
patent: 6639710 (2003-10-01), Kurczynski et al.
patent: 6682199 (2004-01-01), Kaneko
patent: 2003/0063401 (2003-04-01), Kurczynski
patent: 2005/0030438 (2005-02-01), Nishioka

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