Bi-directional mass airflow sensor having integral wheatstone br

Details Bi-directional mass airflow sensor having integral wheatstone br Bi-directional mass airflow sensor having integral wheatstone br

1998-06-29

2000-10-17

Patel, Harshad

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

061314536

ABSTRACT:
A low cost, bi-directional airflow sensing device based on sensed temperature differential due to airflow achieves improved sensitivity and accuracy, and reduced manufacturing cost, by providing two separate pairs of upstream and downstream sensing elements on the same substrate, and connecting the sensing elements as the four legs of an on-chip Wheatstone bridge. The sensitivity is at least doubled since sensor elements are connected in each of the bridge legs, and accuracy and cost are improved through the elimination of off-chip bridge resistors. Additional improvements in the susceptibility to electromagnetic interference (EMI) are realized since the bridge is fully closed on the sensor substrate, and the bridge resistors are located in close proximity.

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