Bi-directional mass air flow sensor having mutually-heated senso

Details Bi-directional mass air flow sensor having mutually-heated senso Bi-directional mass air flow sensor having mutually-heated senso

1997-08-28

1998-10-27

Noori, Max H.

Measuring and testing

Volume or rate of flow

Thermal type

7320417, G01F 168

Patent

active

058279601

ABSTRACT:
A low cost, bi-directional manifold air flow sensing device based on sensed temperature differential due to airflow achieves improved sensitivity and frequency response by eliminating the heater element of the conventional sensor topology, and operating the sensor elements at a relatively higher current so that each temperature sensing element heats both itself and the other temperature sensing element. The sensitivity is significantly increased due to the increased current in the sensor elements, and the frequency response is significantly increased due to closer spacing of the sensor elements. With this new topology, the sensor elements are said to be mutually heated. In a particularly advantageous mechanization, the sensing device includes two separate pairs of upstream and downstream sensing elements, and the sensing elements are connected in the four legs of a Wheatstone bridge. The sensitivity is doubled since sensor elements are connected in each of the bridge legs, and performance and cost are improved through the elimination of off-chip bridge components. A simple, low cost, temperature compensation circuit compensates for ambient temperature variations.

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