.beta.-silicon carbide protective coating and method for fabrica

Batteries: thermoelectric and photoelectric – Photoelectric – Cells

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136259, 20419216, 427554, 4273722, 4273761, 427331, 437 2, 437173, 257433, 257788, H01L 31048, H01L 3118, H01L 310216

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053604911

ABSTRACT:
A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.

REFERENCES:
patent: 4446169 (1984-05-01), Castle et al.
patent: 4749631 (1988-06-01), Haluska et al.
patent: 5106687 (1992-04-01), Tanino et al.
patent: 5154810 (1992-10-01), Kamerling et al.
T. Sugii et al., IEEE Elec. Dev. Lett. vol. 9 (2) 87 (1988).

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