Bernoulli pickup head with self-restoring anti-tilt improvement

Details Bernoulli pickup head with self-restoring anti-tilt improvement Bernoulli pickup head with self-restoring anti-tilt improvement

1976-06-02

1977-06-14

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

271 97, B66C 102

Patent

active

040293513

ABSTRACT:
A pickup head, which is of the type referred to in the art as a Bernoulli pickup head, is used to lift and/or transport a semiconductor wafer. The head is provided with a central positive pressure gas coupled orifice or port and at least three auxiliary positive pressure gas coupled orifices disposed symmetrically about the central orifice. The gas flow from the central orifice effects the main lifting force and the gas flow from the auxiliary orifices effects additional restoring torque to correct for any wafer tilt, if present. Thus, the integrity of the non-contacting relationship between the head and wafer surface is enhanced and/or preserved and this is particularly advantageous on lift-off.

REFERENCES:
patent: 3438668 (1969-04-01), Olsson et al.
patent: 3466079 (1969-09-01), Mammel
patent: 3517958 (1970-06-01), Boucher et al.
patent: 3523706 (1970-08-01), Logue
patent: 3539216 (1970-11-01), Forcier
"Wafer Pickup Head", Leoff et al., IBM Technical Disclosure Bulletin, vol. 14, No. 8, Jan. 1972, pp. 2311-2312.

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