Benzoates containing a substituent having olefinic unsaturation

Details Benzoates containing a substituent having olefinic unsaturation Benzoates containing a substituent having olefinic unsaturation

1991-07-15

1992-04-21

Michl, Paul R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

5262923, 560104, C08F 2026, C08F12036

Patent

active

051069326

ABSTRACT:
Polymers suitable for use as positive photoresists can be prepared, in the absence or presence of other olefinically unsaturated monomers, from benzoates comprising an olefinic unsaturated substituent and consisting of formula I ##STR1## wherein R.sub.1 and R.sub.2 are each independently of the other a hydrogen atom, C.sub.1 -C.sub.4 alkyl or phenyl, R.sub.3 is a hydrogen atom, methyl or a halogen atom, R.sub.4 is a hydrogen atom or methyl, R.sub.5 is C.sub.1 -C.sub.4 alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.6 and R.sub.7 are each independently of the other a hydrogen atom, C.sub.1 -C.sub.4 alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.5 and R.sub.7, when taken together, may also be an unsubstituted or a C.sub.1 -C.sub.4 alkyl-, C.sub.1 -C.sub.4 alkoxy-, C.sub.6 -C.sub.12 aryl- or C.sub.6 -C.sub.12 aryloxy-substituted ethylene, propylene or butylene radical.

REFERENCES:
patent: 3515552 (1970-06-01), Smith
patent: 3645970 (1972-02-01), Kleiner
patent: 3779778 (1973-12-01), Smith et al.
patent: 4939070 (1990-07-01), Brunsvold et al.
patent: 4965316 (1990-10-01), Steinmann

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