Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acid esters
Patent
1992-02-04
1992-11-24
Michl, Paul R.
Organic compounds -- part of the class 532-570 series
Organic compounds
Carboxylic acid esters
C07C 6976
Patent
active
051664054
ABSTRACT:
Polymers suitable for use as positive photoresists can be prepared, in the absence or presence of other olefinically unsaturated monomers, from benzoates comprising an olefinic unsaturated substituent and consisting of formula I ##STR1## wherein R.sub.1 and R.sub.2 are each independently of the other a hydrogen atom, C.sub.1 -C.sub.4 alkyl or phenyl, R.sub.3 is a hydrogen atom, methyl or a halogen atom, R.sub.4 is a hydrogen atom or methyl, R.sub.5 is C.sub.1 -C.sub.4 alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.6 and R.sub.7 are each independently of the other a hydrogen atom, C.sub.1 -alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.5 and R.sub.7, when taken together, may also be an unsubstituted or a C.sub.1 -C.sub.4 alkyl-, C.sub.1 -C.sub.4 alkoxy-, C.sub.6 -C.sub.12 aryl- or C.sub.6 -C.sub.12 aryloxy-substituted ethylene, propylene or butylene radical.
REFERENCES:
patent: 3515552 (1970-06-01), Smith
patent: 3645970 (1972-02-01), Kleiner
patent: 3779778 (1973-12-01), Smith et al.
patent: 4939070 (1990-07-01), Brunsvold et al.
patent: 4965316 (1990-10-01), Steinmann
Ciba-Geigy Corporation
Michl Paul R.
Teoli, Jr. William A.
Villamizar JoAnn
Yoon Tae H.
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