Benzoates containing a substituent having olefinic unsaturation

Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acid esters

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C07C 6976

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active

051664054

ABSTRACT:
Polymers suitable for use as positive photoresists can be prepared, in the absence or presence of other olefinically unsaturated monomers, from benzoates comprising an olefinic unsaturated substituent and consisting of formula I ##STR1## wherein R.sub.1 and R.sub.2 are each independently of the other a hydrogen atom, C.sub.1 -C.sub.4 alkyl or phenyl, R.sub.3 is a hydrogen atom, methyl or a halogen atom, R.sub.4 is a hydrogen atom or methyl, R.sub.5 is C.sub.1 -C.sub.4 alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.6 and R.sub.7 are each independently of the other a hydrogen atom, C.sub.1 -alkyl or C.sub.6 -C.sub.12 aryl, and R.sub.5 and R.sub.7, when taken together, may also be an unsubstituted or a C.sub.1 -C.sub.4 alkyl-, C.sub.1 -C.sub.4 alkoxy-, C.sub.6 -C.sub.12 aryl- or C.sub.6 -C.sub.12 aryloxy-substituted ethylene, propylene or butylene radical.

REFERENCES:
patent: 3515552 (1970-06-01), Smith
patent: 3645970 (1972-02-01), Kleiner
patent: 3779778 (1973-12-01), Smith et al.
patent: 4939070 (1990-07-01), Brunsvold et al.
patent: 4965316 (1990-10-01), Steinmann

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