Belt-shaped mold and nanoimprint system using the...

Plastic article or earthenware shaping or treating: apparatus – Press forming means – press reshaping means – or vulcanizing...

Reexamination Certificate

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C425S373000, C425S385000, C425S471000, C977S887000

Reexamination Certificate

active

07654815

ABSTRACT:
There is provided a fine pattern transfer, belt-shaped mold, with which a fine structure having a high aspect ratio can be formed rapidly and stably using nanoimprinting, and a fine pattern transfer system (a nanoimprint system) that employs this mold. According to the present invention, a nanoimprint mold includes: a belt-shaped support member; a plurality of stampers, for each of which a fine convex-and-concave pattern, to be transferred, is formed on one surface; and an adhesive member, to which the belt-shaped support member and the stampers are to be securely adhered, wherein the adhesive member includes a porous member and adhesive layers, which are deposited on either face of the porous member, for impregnating one part of the porous member, and wherein, for the porous member, a porous area that is not impregnated with the adhesive layers, is provided and positioned so as to sandwich the porous member between portions impregnated with the adhesive layers.

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patent: 2006-326948 (2006-12-01), None
S. Y. Chou et. al., “Imprint of sub-25 nm vias and trenches in polymers”, Appl. Phys. Lett., vol. 67, p. 3114 (Nov. 1995).
Hua Tan et al., “Roller nanoimprint lithography”, J. Vac. Sci. Technol., B16(6), p. 3926 (Nov. 1998).

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