Bearing assembly, stage device using same, and exposure...

Details Bearing assembly, stage device using same, and exposure... Bearing assembly, stage device using same, and exposure...

2007-08-28

2007-08-28

Le, Dang (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S090500

Reexamination Certificate

active

11214752

ABSTRACT:
A stage apparatus includes a guide provided with a surface including a magnetic body, a moving body movable along the surface, a gas bearing for supporting the moving body with respect to the surface, and a magnet which is supplied to the moving body and produces a magnetic attractive force with the magnetic body. The surface of the guide has edges to define its size in a width direction, which is orthogonal to a traveling direction of the moving body to limit movement of the moving body in the width direction, using a magnetic attractive force of the magnet in a direction parallel to the surface, and to apply pre-pressure to the gas bearing.

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