Bearing assembly, stage device using same, and exposure...

Details Bearing assembly, stage device using same, and exposure... Bearing assembly, stage device using same, and exposure...

2006-08-01

2006-08-01

Le, Dang (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C310S012060

Reexamination Certificate

active

07084538

ABSTRACT:
A stage base includes a magnetic body and has a slider guide surface defined by a groove. A portion of the slider that opposes the guide surface is provided with an air pad, whereby a hydrostatic bearing is formed. The slider is further provided with a pressurizing magnet for applying a magnetic attractive force between itself and the guide surface in a direction perpendicular to the guide surface. Displacement of the slider in a direction orthogonal to the travelling direction thereof is limited to a predetermined range using a magnetic attractive force, which is parallel to the guide surface, produced when at least a part of the pressurizing magnet deviates from the guide surface.

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