Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-03-07
2006-03-07
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C310S010000, C310S012060, C318S649000
Reexamination Certificate
active
07009685
ABSTRACT:
A counter balance apparatus for stabilizing a scanning system during lithographic processing comprises a baseframe, at least one counter balance (reaction mass) movably coupled to the baseframe by at least three first bearings and coupled to a stage by at least two second bearings and at least one drive, and a plurality of bellows. Each bellows surrounds a corresponding first bearing and has a first end coupled to a counter balance. The apparatus can comprise an enclosure containing a controlled environment and enclosing the stage, the second bearings, the drive, and the counter balance(s), such that each bellows separates a corresponding first bearing from the controlled environment. The apparatus provides a simplified, cost-effective way of using any type of bearing to support and guide a counter balance located in a controlled environment while preventing contamination of the environment.
REFERENCES:
patent: 6126169 (2000-10-01), Sogard et al.
patent: 6614508 (2003-09-01), Phillips et al.
patent: 6765650 (2004-07-01), Novak
patent: 6794660 (2004-09-01), Watson
patent: 2002/0102481 (2002-08-01), Lee et al.
patent: 2002/0104453 (2002-08-01), Lee et al.
patent: 2004/0160585 (2004-08-01), Jacobs et al.
Muller, Gerrit, “The Waferstepper Challenge: Innovation and Reliability despite Complexity,” Version 1.0, Embedded Systems Institute, May 21, 2003 (12 pages) (viewed online at http://www.ict-kenniscongres.nl/sites/ict/contents/i000638/muller.pdf).
ASML Holding N.V.
Rutledge D.
Sterne Kessler Goldstein & Fox P.L.L.C.
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