Bearing arrangement for reaction mass in a controlled...

Details Bearing arrangement for reaction mass in a controlled... Bearing arrangement for reaction mass in a controlled...

2005-09-20

2005-09-20

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C355S053000, C310S010000, C310S012060, C318S649000

Reexamination Certificate

active

06947125

ABSTRACT:
A reaction mass apparatus for stabilizing a scanning system during lithographic processing comprises a baseframe; at least one reaction mass movably coupled to the baseframe by at least three first bearings and coupled to a stage by at least two second bearings and at least one drive; and a plurality of bellows, each bellows surrounding a corresponding first bearing, the bellows each having a first end coupled to a reaction mass and a second end coupled to the baseframe. The apparatus can comprise an enclosure, containing a controlled environment and enclosing the stage, the second bearings, the drive, and the reaction mass, wherein each bellows separates a corresponding first bearing from the controlled environment and wherein each bellows second end is coupled to the enclosure.

REFERENCES:
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patent: 6614508 (2003-09-01), Phillips et al.
patent: 6765650 (2004-07-01), Novak
patent: 6794660 (2004-09-01), Watson
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patent: 2002/0105481 (2002-08-01), Lee et al.
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Muller, Gerrit, “The Waferstepper Challenge: Innovation and Reliability despite Complexity,” Version 1.0, Embedded Systems Institute, May 21, 2003 (12 pages).

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