Optical: systems and elements – Lens – With variable magnification
Patent
1994-10-28
1996-09-17
Epps, Georgia Y.
Optical: systems and elements
Lens
With variable magnification
359676, 359727, G02B 1514, G02B 1700
Patent
active
055574696
ABSTRACT:
An optical system to project an image from an illuminated object to an image plane with a selected magnification factor. This system includes a lens system having a fixed magnification factor and at least one flat plate that is optically compatible with the lens system and which when bent into a cylindrical shape varies the fixed magnification factor of the lens system along one axis of the image. This variable magnification technique is applicable to all lens system types, including a Wynne Dyson type projection system. In addition, a Wynne Dyson optical projection system that includes an optical block in place of the usual fold prism is discussed. The optical block reduces changes in distortion caused by heat transferred from the reticle. The block permits the inclusion of a dichroic beamsplitter diagonally through the optical block which presents minimal attenuation of the exposure illumination. The beamsplitter reflects a portion of the light returning from the image plane to a conjugate focal plane where alignment between the image and the pattern on the substrate can be viewed with a microscope. Illumination projected through the conjugate image plane permits the pattern on the substrate to be viewed directly without interference from the object pattern.
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Jeong Hwan J.
Markle David A.
Epps Georgia Y.
Jones Allston L.
Mack Ricky
Ultratech Stepper, Inc.
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