Beam type transducers employing dual direction force limiting me

Details Beam type transducers employing dual direction force limiting me Beam type transducers employing dual direction force limiting me

1976-09-22

1977-09-27

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Fluid- or gas pressure-actuated

73141A, 338 4, H01L 1010

Patent

active

040514510

ABSTRACT:
A beam type transducer of the type activated by a push rod, which rod is secured to a thin silicon diaphragm including a shallow deflection area determining depression. The rod is secured to the silicon diaphragm within the depression and is surrounded by a glass plate. The glass plate has a central accommodating aperture for insertion of the rod therethrough and has a spherical depression ground on a surface and of a diameter relatively equal to the diameter of the depression in said silicon. The glass plate is bonded about its periphery to cover the silicon diaphragm with the spherical depression facing the depression in the silicon. The rod is bonded to the silicon and directed through the aperture in the glass. Immediately below the aperture in the glass and encircling the rod is a cylindrical member which acts as a negative over pressure stop. The other end of the rod is coupled to a beam for application of a force thereto. The structure described operates to limit the forces applied to the transducer in a positive direction and in a negative direction. The magnitude of desired forces are limited by causing the silicon diaphragm to impinge upon the spherical glass surface. For negative forces, the cylindrical member impinges against the bottom surface of the glass plate to thus limit these undesired forces.

REFERENCES:
patent: 3389362 (1968-06-01), McLellan
patent: 3461416 (1969-08-01), Kaufman
patent: 3970982 (1976-07-01), Kurtz

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