Beam type transducers employing accurate, integral force limitin

Details Beam type transducers employing accurate, integral force limitin Beam type transducers employing accurate, integral force limitin

1975-07-07

1976-07-20

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

73141A, 338 42, G01L 122

Patent

active

039709825

ABSTRACT:
A beam transducer of the type activated by a push rod secured to a thin silicon diaphragm including a shallow deflection area determining depression. The rod is secured to the silicon within the depression and is surrounded by a plate of glass having a central rod accommodating aperture and secured to the silicon to generally cover the depression with the rod extending through the aperture in the glass. One end of the rod is coupled to a diffused beam for application of force thereto. Large forces as applied to the diaphragm and hence, the rod and the beam are limited when the silicon is caused to contact the glass plate and is stopped by the plate and according to the depth of the depression.

REFERENCES:
patent: 3204463 (1965-09-01), Tuber
patent: 3389362 (1968-06-01), McLellan
patent: 3461416 (1969-08-01), Kaufman

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