Beam splitter/combiner for optical metrology tool

Details Beam splitter/combiner for optical metrology tool Beam splitter/combiner for optical metrology tool

2007-07-31

2007-07-31

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S369000

Reexamination Certificate

active

11334999

ABSTRACT:
A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

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