Beam shaping element for use in a lithographic system

Optical: systems and elements – Diffusing of incident light

Reexamination Certificate

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C359S015000, C359S025000, C355S067000, C355S071000

Reexamination Certificate

active

06970292

ABSTRACT:
A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane. Thus, the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.

REFERENCES:
patent: 4170396 (1979-10-01), Kraft
patent: 4410237 (1983-10-01), Veldkamp
patent: 4455061 (1984-06-01), Case
patent: 4547037 (1985-10-01), Case
patent: 4682841 (1987-07-01), Afian et al.
patent: 4979791 (1990-12-01), Bowen et al.
patent: 5061025 (1991-10-01), Debesis
patent: 5074649 (1991-12-01), Hamanaka
patent: 5075800 (1991-12-01), Hasman et al.
patent: 5117476 (1992-05-01), Yingst et al.
patent: 5202775 (1993-04-01), Feldman et al.
patent: 5289298 (1994-02-01), Smith
patent: 5315427 (1994-05-01), Rauch et al.
patent: 5320918 (1994-06-01), Raab et al.
patent: 5333077 (1994-07-01), Legar et al.
patent: 5361149 (1994-11-01), Hasegawa et al.
patent: 5383000 (1995-01-01), Michaloski et al.
patent: 5393634 (1995-02-01), Maker et al.
patent: 5534386 (1996-07-01), Petersen et al.
patent: 5610733 (1997-03-01), Feldman
patent: 5630661 (1997-05-01), Fox
patent: 5631721 (1997-05-01), Stanton et al.
patent: 5657138 (1997-08-01), Lewis et al.
patent: 5850300 (1998-12-01), Kathman et al.
patent: 5861990 (1999-01-01), Tedesco
patent: 5896188 (1999-04-01), McCullough
patent: 6002520 (1999-12-01), Hoch et al.
patent: 6665050 (2003-12-01), Shiraishi
patent: 0 580 905 (1994-02-01), None
patent: 0 744 664 (1996-11-01), None
patent: 2716726 (1995-09-01), None
M. Duparré, et al., “Investigation of computer-generated diffractive beam shapers for flattening of single-modal CO2 laser beams”, Applied Optics, vol. 34, No. 14, pp. 2489-2497, May 10, 1995.
Bains, Sunny, “Holographic optics : when less is more”, Laser Focus World, pp. 151-156, (Apr. 1993).
Brauer, R., et al., “Diffusers in digital Holography”, J. Opt. Soc. America, vol. 6, No. 3, pp. 572-578, (Mar. 1991).
Cederquist, J., et al. “Computer-generated holograms for geometric transformations”, Applied Optics, vol. 23, No. 18, pp. 3099-3104, (Sep. 18, 1984).
Dames, et al. “Efficient optical elements to generate intensity weighted spot arrays : design and fabrication”, Applied Optics, vol. 30, No. 19, pp. 2685-2691 (Jul. 1, 1991).
Eismann, M.T., et al, “Iterative design of a holographic beamformer”, Applied Optics, vol. 28, No. 13, pp. 2641-2649, (Jul. 1989).
Feldman, M.R., et al., “Iterative encoding of high-efficiency holograms for generation of spot arrays”, Optics Letters, vol. 14, No. 10, pp. 479-481, (May 15, 1989).
Golub, M.A., et al, “Focusing light into a specified volume by computer-synthesized Holograms”, Sov. Tech. Phys. Lett, 7(5), pp. 264-265 (May 1981).
Lee, Wai-Hon, “Method for converting a Gaussian laser beam into a uniform beam”, Optics Comm. vol. 36, No. 6, pp. 469,471, (Mar. 15, 1981).
Stark, H., et al. “Design of phase gratings by generalized projections”, J.Opt. Soc. Am. A vol. 8, No. 3, pp. 569-471, (Mar. 15, 1991).
Vasara, et al, “Realization of general nondiffracting beams with computer-generated holograms”, J. Optical Society America A. vol. 6, No. 11, pp. 1748-1754 (Nov. 1989).
WU, Y.H., et al., “Cell-oriented on axis computer-generated holograms for use in the Fresnel Diffraction Mode”, Applied Optics, vo. 23, No. 2, pp. 228-243 (Jan. 15, 1984).

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