Beam scanning system including actively-controlled optical head

Optical: systems and elements – Deflection using a moving element

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Details

359820, 359210, 359824, 369 4415, 235472, G02B 2608

Patent

active

053030800

ABSTRACT:
Beam scanning system that incorporates an actively-controlled optical head, wherein a light beam source and collimating optics are mounted in an active, thermally-compensated assembly. A collimating optics mount preferably in the form of a flexure plate having a three-point elastic hinge is supported on a base plate by a respective number of equally-spaced actuators. The motion of the flexure plate is thereby over constrained and allows the operation of the elastic hinge to benefit from elastic averaging such that motion of the flexure plate may be effected by the actuators individually or in combination. Controlled flexure plate motion may be implemented to compensate for thermal shifts in system focal length, while maintaining radial and angular alignment of the collimating optics relative to the beam source, according to the influence of the individual actuators. Active control of the actuators also allows controlled movement of the collimating lens in two degrees of lateral motion (x and y motions), in addition to a piston or z motion, and tilting or tipping motions. Active control of the actuators is effected according to a control system that uses an influence matrix derived from one or more transfer function matrices to relate the position control signals to the control of desired beam scanning optical performance parameters, such as beam position or beam focus.

REFERENCES:
patent: 4205350 (1980-05-01), Gunning
patent: 4318582 (1982-03-01), Minoura et al.
patent: 4841135 (1989-06-01), Goto et al.
patent: 4971413 (1990-11-01), Inoue
patent: 5144120 (1992-09-01), Krichever et al.
patent: 5210650 (1993-05-01), O'Brien et al.
patent: 5225924 (1993-07-01), Ogawa et al.

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