Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-23
2007-10-23
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S517000, C356S369000
Reexamination Certificate
active
11109525
ABSTRACT:
Device and method for measuring complex reflectance using a light source for generating a light beam with known polarization state, a lens for focusing the beam onto a sample surface such that various rays within the focused beam create a spread of angles of incidence θ, a waveplate for retarding one polarization state of the beam, a polarizer for generating interference between beam polarization states, and a detector with a two dimensional array of detector elements for generating intensity signals in response to the beam, wherein each detector element corresponds to a unique angle of incidence θ and azimuthal angle φ of the reflected beam. A processor calculates magnitude and phase values for the reflected beam by using the intensity signals corresponding to at least one incident angle θ and a plurality of azimuthal angles φ within the at least one incident angle θ sufficient to enable a meaningful Fourier analysis thereof.
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Arist Instruments, Inc.
Connolly Patrick
DLA Piper (US) LLP
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