Electric heating – Metal heating – By arc
Reexamination Certificate
2006-09-19
2006-09-19
Heinrich, Samuel M. (Department: 1725)
Electric heating
Metal heating
By arc
C219S121760, C359S618000, C359S629000
Reexamination Certificate
active
07109435
ABSTRACT:
According to the present invention, a laser annealing apparatus (10) includes a beam splitter (14) composed of first and second beam splitters (21, 22) disposed in parallel to each other to split one laser beam into four laser beams not interfering with each other, and a reflecting mirror (23). Upon the second beam splitter (22), there are incident a transmitted beam from the first beam splitter (21) and a laser beam outgoing from the first beam splitter (21) and then reflected by the reflecting mirror (23). The second beam splitter (22) provides two transmitted beams to outside, and the reflecting mirror (23) reflects the reflected beam from the second beam splitter (22) for traveling to outside. The distance between the two beam splitters (21and22), and the distance between the first beam splitter (21) and reflecting mirror (23), is larger than L/(2 cos θ) (where θ is an incident angle and L is a coherence length).
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Tatsuki Koichi
Tsukihara Koichi
Heinrich Samuel M.
Sonnenschein Nath & Rosenthal LLP
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