Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2008-07-08
2008-07-08
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S206100, C359S208100, C359S214100, C359S215100, C219S121750
Reexamination Certificate
active
07397592
ABSTRACT:
A galvanometer mirror rotates in one direction when the galvanometer mirror is used. A spot can be scanned on an irradiated surface at a more constant speed by rotating the galvanometer mirror and by using the inertia. Moreover, it is preferable to make the galvanometer mirror heavy because the inertia becomes higher so that the spot is scanned at a more constant speed. In addition, in a polygon mirror of this invention, mirrors are arranged so as not to contact each other because a change time of the scanning position between the mirrors is provided. By moving the irradiated object with timing together when the laser light is not irradiated, the laser process can be performed efficiently.
REFERENCES:
patent: 4330363 (1982-05-01), Biegesen et al.
patent: 4504354 (1985-03-01), George et al.
patent: 5365875 (1994-11-01), Asai et al.
patent: 5712191 (1998-01-01), Nakajima et al.
patent: 5835249 (1998-11-01), Yamada et al.
patent: 5893990 (1999-04-01), Tanaka
patent: 5896233 (1999-04-01), Soda et al.
patent: 6849825 (2005-02-01), Tanaka
patent: 6897889 (2005-05-01), Tanaka
patent: 7125761 (2006-10-01), Tanaka
patent: 7259082 (2007-08-01), Tanaka
patent: 2002/0031876 (2002-03-01), Hara et al.
patent: 2003/0021307 (2003-01-01), Yamazaki
patent: 2003/0047732 (2003-03-01), Yamazaki et al.
patent: 2004/0074881 (2004-04-01), Oishi
patent: 2004/0106237 (2004-06-01), Yamazaki
patent: 2004/0112882 (2004-06-01), Miyairi et al.
patent: 2004/0135644 (2004-07-01), Mizoguchi et al.
patent: 2004/0209410 (2004-10-01), Tanaka
patent: 2005/0037552 (2005-02-01), Yamazaki et al.
patent: 07-326769 (1995-12-01), None
patent: 2003-045890 (2003-02-01), None
patent: 2003-059831 (2003-02-01), None
patent: 2003-086505 (2003-03-01), None
patent: 2003-086507 (2003-03-01), None
Office Action (Application No. 200410036922.4) dated Mar. 2, 2007.
Phan James
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
LandOfFree
Beam irradiation apparatus, beam irradiation method, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Beam irradiation apparatus, beam irradiation method, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Beam irradiation apparatus, beam irradiation method, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2743387