Beam irradiation apparatus

Details Beam irradiation apparatus Beam irradiation apparatus

2009-07-09

2011-12-06

Font, Frank (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C250S206100, C356S004010

Reexamination Certificate

active

08072662

ABSTRACT:
A beam irradiation apparatus includes: an actuator which scans a target region with a laser beam; a photodetector which receives a servo beam and outputs a signal according to a beam reception position; an optical unit which makes the servo beam displaced on the photodetector in association with driving of the actuator; and a position signal generation circuit that generates a signal according to the reception position of the servo beam based on an output signal from the photodetector. The position signal generation circuit has a signal removal circuit that removes a disturbance signal generated when the laser beam is incident on the photodetector, from an output signal of the photodetector.

REFERENCES:
patent: 5281812 (1994-01-01), Lee et al.
patent: 7092075 (2006-08-01), Singh et al.
patent: 7576838 (2009-08-01), Shirai
patent: 2010/0073664 (2010-03-01), Krasutsky
patent: 1183988 (1999-03-01), None

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