Beam irradiation apparatus

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element

Reexamination Certificate

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C359S209100, C250S234000

Reexamination Certificate

active

07826117

ABSTRACT:
An attachment lens is arranged in a stage subsequent to a scanning lens. After a laser beam is converged by the scanning lens, the laser beam is converted into a parallel beam by the attachment lens. When the scanning lens is displaced in a direction perpendicular to an optical axis of the laser beam, a traveling direction of the laser beam is bent by a predetermined angle immediately after the laser beam passes through the scanning lens. Then, the traveling direction of the laser beam is further bent by a predetermined angle in the same direction by the passage of the laser beam through the attachment lens. Accordingly, a final swing angle of the laser beam outgoing from an outgoing window is increased by a swing angle imparted by the attachment lens compared with the case where the attachment lens is not arranged. One of lens surfaces of the attachment lens is formed in a toroidal surface, which allows the laser beam to have a long outline in a vertical direction.

REFERENCES:
patent: 6057967 (2000-05-01), Takahashi et al.
patent: 7182463 (2007-02-01), Conner et al.
patent: 58108038 (1983-06-01), None
patent: 650752 (1994-02-01), None
patent: 675298 (1994-09-01), None
patent: 11-083988 (1999-03-01), None
patent: 2002131431 (2002-05-01), None
Japanese Office Action for corresponding JP Application No. 2006-058578, May 26, 1926, Japan.

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