Beam intensity profilometer

Radiant energy – Luminophor irradiation – With ultraviolet source

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250365, 250372, G01J 548

Patent

active

049163191

ABSTRACT:
A beam intensity profilometer produces a fluorescent emission distribution having a spatial distribution linearly proportional to the local intensity of an incident UV beam shined into the profilometer. The spatial distribution of the UV beam is analyzed and displayed as a function of the fluorescent emission.

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J. M. Robertson et al., "Cathodoluminescent Garnet Layers", Thin Solid Films, 114, (1984), pp. 221-240.
G. Edwards, "Choosing and Using Laser-Beam-Profile Monitors", Laser Focus/Electro-Optics, (May, 1987), pp. 76-84.
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Telfair et al., "Characterization of UV Laser Beams Using Fluorescence", SPIE (Jan. 15, 1988).

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