Beam, ink jet recording head having beams, and method for...

Details Beam, ink jet recording head having beams, and method for... Beam, ink jet recording head having beams, and method for...

2007-08-08

2010-11-16

Sample, David R (Department: 1783)

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

C347S064000, C347S065000, C347S056000, C428S167000, C428S166000, C428S172000

Reexamination Certificate

active

07833608

ABSTRACT:
A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

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