Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Reexamination Certificate
2011-08-16
2011-08-16
Sample, David R (Department: 1783)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
C428S167000, C428S172000, C428S166000, C347S056000, C347S064000, C347S065000
Reexamination Certificate
active
07998555
ABSTRACT:
A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.
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Hayakawa Kazuhiro
Terui Makoto
Ushijima Takashi
Yamazaki Takeo
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Sample David R
Simone Catherine
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