Beam homogenizer, laser irradiation apparatus, and method of...

Details Beam homogenizer, laser irradiation apparatus, and method of... Beam homogenizer, laser irradiation apparatus, and method of...

2011-03-01

2011-03-01

Lepisto, Ryan (Department: 2883)

Optical waveguides

With optical coupler

Input/output coupler

C385S015000, C385S133000

Reexamination Certificate

active

07899282

ABSTRACT:
The present invention provides a beam homogenizer being equipped with an optical waveguide having a pair of reflection planes provided oppositely, having one end surface into which the laser beam is incident, and having the other end surface from which the laser beam is emitted in the optical system for forming the beam spot. The optical waveguide is a circuit being able to keep radiation light in a certain region and to transmit the radiation light in such a way that the energy flow thereof is guided in parallel with an axis of the channel.

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