Optical waveguides – With optical coupler – Particular coupling structure
Reexamination Certificate
2011-03-29
2011-03-29
Kianni, K. Cyrus (Department: 2883)
Optical waveguides
With optical coupler
Particular coupling structure
C385S014000
Reexamination Certificate
active
07916987
ABSTRACT:
The present invention is to provide a beam homogenizer, a laser irradiation apparatus, and a method for manufacturing a semiconductor device, which can suppress the loss of a laser beam and form a beam spot having homogeneous energy distribution constantly on an irradiation surface without being affected by beam parameters of a laser beam. A deflector is provided at an entrance of an optical waveguide or a light pipe used for homogenizing a laser beam emitted from a laser oscillator. A pair of reflection planes of the deflector is provided so as to have a tilt angle to an optical axis of the laser beam, whereby the entrance of the optical waveguide or the light pipe is expanded. Accordingly, the loss of the laser beam can be suppressed. Moreover, by providing an angle adjusting mechanism to the deflector, a beam spot having homogeneous energy distribution can be formed at an exit of the optical waveguide.
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Oishi Hirotada
Tanaka Koichiro
Kianni K. Cyrus
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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