Beam homogenizer, and laser irradiation method, laser...

Details Beam homogenizer, and laser irradiation method, laser... Beam homogenizer, and laser irradiation method, laser...

2005-10-18

2010-02-16

Healy, Brian M (Department: 2883)

Optical waveguides

Miscellaneous

C385S146000, C385S014000, C438S487000, C372S009000, C257SE21090

Reexamination Certificate

active

07664365

ABSTRACT:
A rectangular beam having the energy density distribution homogenized in its short-side direction is formed in a beam homogenizer wherein two light reflection surfaces are parallel-provided in a beam progression optical waveguide with a predetermined space so as to face each other at surfaces along the beam progression direction and a course change reflection surface for changing the beam progression direction is formed at a surface in the direction intersected with the light reflection surfaces. The beam enters a cylindrical lens array and a cylindrical lens sequentially to homogenize the energy density distribution in its long-side direction. Then, the irradiation laser from the cylindrical lens is projected onto a non-single crystalline semiconductor film to perform annealing.

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International Search Report (Application No. PCT/JP2005/019447) dated Jan. 17, 2006.
Written Opinion (Application No. PCT/JP2005/019447) dated Jan. 17, 2006.

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