Coherent light generators – Particular resonant cavity – Specified cavity component
Patent
1998-06-22
2000-12-19
Font, Frank G.
Coherent light generators
Particular resonant cavity
Specified cavity component
372 19, 372 57, H01S 3098, H01S 322, H01S 308
Patent
active
061635596
ABSTRACT:
A line narrowed ultraviolet laser having a line narrowing system which includes a grating and an all reflective beam expander. In a preferred embodiment, the beam expander consists of a relatively small circular cylindrical mirror and relatively larger elliptical cylindrical mirror and the grating is an eschelle grating mounted in a Littrow configuration.
REFERENCES:
patent: 3953667 (1976-04-01), Layton et al.
patent: 4690559 (1987-09-01), Florek et al.
patent: 5343326 (1994-08-01), Ossman et al.
patent: 5970082 (1999-10-01), Ershov
patent: 5978394 (1999-11-01), Newman et al.
McKee, Canadian Journal of Physics, vol. 63 (1985).
Laser Handbook, vol. 5, North-Holland Press, pp. 45-46 (1985).
Cymer Inc.
Font Frank G.
Rodriguez Armando
Ross, Esq. John R.
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