Coherent light generators – Particular beam control device – Q-switch
Patent
1996-01-25
1997-01-21
Healy, Brian
Coherent light generators
Particular beam control device
Q-switch
372 9, 372107, 372108, 372109, H01S 3121
Patent
active
055965903
ABSTRACT:
A shutter mechanism having a slide element coupled to a support base by a plurality of roller bearings journaled between opposing pairs of guide rods is disclosed. The slide element and support base have corresponding beam apertures in alignment when the shutter is in its open position. Angularly mounted on the slide, adjacent to the slide's beam aperture, is a UV reflective mirror. When the shutter is commended to close, an actuator forces the slide and support base apertures out of alignment, while simultaneously positioning the UV reflective mirror into the position previously occupied by the slide's aperture. A laser beam, previously being transmitted through the aligned apertures, will be reflected by the mirror to a beam stop as a diagnostic instrument mounted on the support base.
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de Ruyter Anthony J.
Means David W.
Cymer Laser Technologies
Healy Brian
Power David J.
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