Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2008-03-03
2010-10-19
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C356S237200
Reexamination Certificate
active
07817260
ABSTRACT:
A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
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Armstrong J. Joseph
Chuang Yung-Ho
KLA-Tencor Technologies Corporation
Smyrski Law Group, A P.C.
Toatley Jr. Gregory J
Ton Tri T
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