Beam delivery apparatus and method for interferometry using rota

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356345, 356363, B01B 902

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active

056488483

ABSTRACT:
A method of providing a beam having precisely orthogonally polarized components includes generating a beam with substantially orthogonally polarized components, splitting the beam to separate the components to separate paths, projecting each component into a respective polarization preserving optical fiber (PPF) or polarizing fiber, recombining the components output from the fibers into a single beam, and transmitting the single beam to an interferometer. The PPFs are rotationally adjustable at their output ends to provide precise orthogonality in the resulting beam.

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HP Journal, Apr. 1983, "A new Microcomputer-Controlled Laser Dimensional Measurement and Analysis System," pp. 3-13.
Butterworth & Co., Jan. 1990, vol. 12, No. 1, "Sub-micron Position Measurement and Control on Precision Machine Tools With Laser Interferometery".

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