Beam current measuring device and apparatus using the same

Details Beam current measuring device and apparatus using the same Beam current measuring device and apparatus using the same

2007-01-09

2007-01-09

Wells, Nikita (Department: 2881)

Electricity: measuring and testing

Magnetic

Magnetometers

C250S492210, C324S071300, C424S009300

Reexamination Certificate

active

11023495

ABSTRACT:
A beam current measuring device (BMD) capable of measuring beam current while radiating the beam on a target, such as a semiconductor wafer. The BMD at least includes: (a) a detecting part operable to detect or collect a magnetic field corresponding to the beam current; and (b) a measuring part including (i) a SQUID sensitive to magnetic flux, and (ii) a feedback coil operable to carry feedback current wherein the feedback current is operable to cancel out a change in the magnetic flux penetrating through the SQUID. Wherein the operating point of the SQUID is set according to a finite beam current value, other than zero, which penetrates through the detecting part.A BMD of the present invention can be incorporated and used in an ion-implantation apparatus, an electron beam exposure apparatus, an accelerator, and the like.

REFERENCES:
patent: 4687987 (1987-08-01), Kuchnir et al.
patent: 6159444 (2000-12-01), Schlenga et al.
patent: 6822247 (2004-11-01), Sasaki
patent: 2003/0230732 (2003-12-01), Sasaki
T. Tanabe et al., “A cryogenic current-measuring device with nano-ampere resolution at the storage ring TARN II”, Nuclear Instruments and Methods in Physics Research A 427 (1999) pp. 455-464.
L. Hao et al., “HTS Flux Concentrator For Non-Invasive Sensing of Charged Particle Beams”, ISEC 2001, pp. 469-470.

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